Prof. Cicek a reçu son doctorat en génie électrique de l'Université McGill (Montréal) en 2016 avec nomination pour le prix d'excellence de l'ADESAQ. Depuis 2009, il a oeuvré comme chef du génie en MEMS et directeur de la division des microsystèmes chez MEMS Vision, une entreprise qu'il a co-fondée. En 2014, il a été engagé comme professeur à l'Université du Québec à Montréal (UQAM), où il explore ses intérêts de recherche liés aux microtechnologies: MEMS, microfluidique, microélectronique, encapsulation, et leur intégration mutuelle.
Prof. Cicek est un expert en microfabrication, et possède plus de 10 ans d'expérience en salle blanche. À ce jour, il a rédigé une vingtaine de publications scientifiques et détient 7 brevets accordés. Plein de nouvelles réalisations à l'horizon grâce au  µTIC!

PUBLICATIONS SCIENTIFIQUES

• A. Robichaud, D. Deslandes, P.-V. Cicek, et F. Nabki, “A System in Package Based on a Piezoelectric Micromachined Ultrasonic Transducer Matrix for Ranging Applications,” Sensors, vol. 21, no. 8, p. 2590, avril 2021

• A. Robichaud, D. Deslandes, P. -V. Cicek, et F. Nabki, "Electromechanical Tuning of Piecewise Stiffness and Damping for Long-Range and High-Precision Piezoelectric Ultrasonic Transducers," Journal of Microelectromechanical Systems, vol. 29, no. 5, pp. 1189-1198, octobre 2020

• A. Robichaud, D. Deslandes, P.-V. Cicek, et F. Nabki, "A novel topology for process variation-tolerant piezoelectric micromachined ultrasonic transducers," Journal of Microelectromechanical Systems, vol. 27, no. 6, décembre 2018

• A. Robichaud, P.-V. Cicek, D. Deslandes, et F. Nabki, "Frequency Tuning Technique of Piezoelectric Ultrasonic Transducers for Ranging Applications," Journal of Microelectromechanical Systems, vol. 27, no. 3, juin 2018

• P.-V. Cicek, M. Y. Elsayed, F. Nabki, and M. El-Gamal, "A novel multi-level IC- compatible surface microfabrication technology for MEMS with independently controlled lateral and vertical submicron transduction gaps," Journal of Micromechanics and Microengineering, vol. 27, no. 11, septembre 2017

• M. Y. Elsayed, P.-V. Cicek, F. Nabki, and M. N. El-Gamal, "Bulk Mode Disk Resonator with Transverse Piezoelectric Actuation and Electrostatic Tuning," Journal of Microelectromechanical Systems, vol. 25, no. 2, avril 2016

• M. Y. Elsayed, P.-V. Cicek, F. Nabki, and M.N. El-Gamal, "Surface Micromachined Combined Magnetometer/Accelerometer for Above-IC Integration," Journal of Microelectromechanical Systems, vol. 24, no. 4, p. 1029, août 2015

• Q. Zhang, P.-V. Cicek, K. Allidina, F. Nabki, and M.N. El-Gamal, "Surface- micromachined CMUT using low-temperature deposited silicon carbide membranes for above-IC integration," Journal of Microelectromechanical Systems, vol. 23, no. 2, p. 482, mars 2014

• Q. Zhang, P.-V. Cicek, F.Nabki and M. N. El-Gamal, "Thin-film wafer-level encapsulation technology for above-IC hermetic MEMS packaging," Journal of Micromechanics and Microengineering, vol. 23, no. 12, p. 125012, décembre 2013

 

 M. A. Taghvaei, P.-V. Cicek, K. Allidina, F. Nabki, and N. N. El-Gamal, "A 0.13 μm CMOS Interface Circuit for a MEMS Resonator-Based Vacuum Measurement System," IEEE Transactions on Circuits and Systems I, vol 60, no. 12, p. 3136, décembre 2013

• R. H. Mekky, P.-V. Cicek, and N. N. El-Gamal, "Ultra low-power low-noise transimpedance amplifier for MEMS-based reference oscillators," Proceedings of the IEEE International Symposium on Electronics, Circuits and Systems, p. 345, décembre 2013

• P.-V. Cicek, Q. Zhang, T. Saha, S. Mahdavi, K. Allidina, F. Nabki and M. N. El-Gamal "A novel prototyping method for die-level monolitic integration of MEMS above-IC," Journal of Micromechanics and Microengineering, vol. 23, p. 65013, juin 2013

• F. Nabki, P.-V. Cicek, T. Dusatko, S. Vengallatore, and M. N. El-Gamal, "Low-stress, CMOS-compatible silicon carbide surface micromachining technology—part II: beam resonators for MEMS above IC," Journal of Microelectromechanical Systems, vol. 20, p. 730, juin 2011

• P.-V. Cicek, T. Saha, B. Waguih, F. Nabki, and M. N. El-Gamal, "Design of a low-cost MEMS monolithically-integrated relative humidity sensor," Proceedings of the IEEE International Conference on Microelectronics, p. 172, janvier 2011

• M. A. Taghvaei, P.-V. Cicek, K. Allidina, F. Nabki, and N. N. El-Gamal, "A MEMS- based temperature-compensated vacuum sensor for low-power monolithic integration," Proceedings of the IEEE International Symposium on Electronics, Circuits and Systems, p. 3276, mai 2011

 

• P.-V. Cicek, et al., "Low actuation voltage silicon carbide RF switches for MEMS above IC," Proceedings of the IEEE International Conference on Electronics, Circuits and Systems, pp. 223-226, décembre 2009

• K. Allidina, M. A. Taghvaei, F. Nabki, P.-V. Cicek, and M. N. El-Gamal, "A MEMS-based vacuum sensor with a PLL frequency-to-voltage converter," Proceedings of the IEEE International Conference on Electronics, Circuits and Systems, décembre 2009

• F. Nabki, K. Allidina, F. Ahmad, P.-V. Cicek, et M. N. El-Gamal, "A Highly Integrated 1.8 GHz Frequency Synthesizer Based on a MEMS Resonator," IEEE Journal of Solid-State Circuits, vol. 44, no. 8, p. 2154, août 2009

• D. Lemoine, P.-V. Cicek, F. Nabki, and M. N. El-Gamal, "MEMS wafer-level vacuum packaging with transverse interconnects for CMOS integration," Proceedings of the IEEE Custom Integrated Circuits Conference, pp. 189-192, september 2008

PROPRIÉTÉ INTELLECTUELLE

• A. Robichaud, P.-V. Cicek, D. Deslandes, et F. Nabki, "Electromechanically damped resonator devices and methods," US Patent App 16/867,080, soumis novembre 2020

 

• M.Y. Elsayed, M. N. El-Gamal, F. Nabki, et P.-V. Cicek, "Bulk mode micro- electromechanical resonator devices and methods," US Patent 10 742 191, accordé août 2020

• M.Y. Elsayed, P.-V. Cicek, F. Nabki, and M. N. El-Gamal, "Combined magnetometer accelerometer mems devices and methods," US Patent 10 197 590, accordé février  2019

• M. El-Gamal, P.-V. Cicek, and F. Nabki, "Methods and systems for humidity and pressure sensor overlay integration with electronics," US Patent 10 107 773, accordé octobre 2018

• M. Elsayed, P.-V. Cicek, F. Nabki, and M. N. El-Gamal, "Microelectromechanical bulk acoustic wave devices and methods," US Patent 9 448 069, accordé septembre 2016

• F. Nabki, P.-V. Cicek, and M. N. El-Gamal, "Low temperature ceramic microelectromechanical structures," US Patent 8 975 104, accordé mars 2015

• Q. Zhang, P.-V. Cicek, F. Nabki, and M. N. El-Gamal, "Methods and devices relating to capacitive micromachined diaphragms and transducers," US Patent 101 077 773, soumis mars 2014

• F. Nabki, P.-V. Cicek, and M. N. El-Gamal, "Low temperature ceramic microelectromechanical structures," US Patent 8 658 452, accordé février 2014

• D. Lemoine, P.-V. Cicek, F. Nabki, and M. N. El-Gamal, "Low-Temperature Wafer Level Processing for MEMS Devices," US Patent 8 409 901, accordé avril 2013

Prof. Paul-Vahé Cicek