Prof. Cicek received his PhD degree in Electrical Engineering from McGill University (Montreal) in 2016 with a nomination to the ADESAQ Excellence Prize. Since 2009, he has been working as MEMS Engineering Lead and Manager of the microsystems division at MEMS Vision, a startup company he co-founded. In 2014, he was hired as Professor at Université du Québec à Montréal (UQAM), where he is exploring his research interests related to microtechnologies: MEMS, microfluidics, microelectronics, encapsulation, and their mutual integration.
Prof. Cicek is an expert in microfabrication, and has more than 10 years of extensive experience in the cleanroom. To date, he has authored around 20 publications and holds 7 issued patents, although much more is on the way, thanks to µTIC!

PUBLICATIONS

 

• A. Robichaud, D. Deslandes, P.-V. Cicek, and F. Nabki, “A System in Package Based on a Piezoelectric Micromachined Ultrasonic Transducer Matrix for Ranging Applications,” Sensors, vol. 21, no. 8, p. 2590, April 2021

• A. Robichaud, D. Deslandes, P. -V. Cicek, and F. Nabki, "Electromechanical Tuning of Piecewise Stiffness and Damping for Long-Range and High-Precision Piezoelectric Ultrasonic Transducers," Journal of Microelectromechanical Systems, vol. 29, no. 5, pp. 1189-1198, October 2020

 

• A. Robichaud, P.-V. Cicek, D. Deslandes, and F. Nabki, "Frequency Tuning Technique of Piezoelectric Ultrasonic Transducers for Ranging Applications," Journal of Microelectromechanical Systems, vol. 27, no. 3, June 2018

• P.-V. Cicek, M. Y. Elsayed, F. Nabki, and M. El-Gamal, "A novel multi-level IC- compatible surface microfabrication technology for MEMS with independently controlled lateral and vertical submicron transduction gaps," Journal of Micromechanics and Microengineering, vol. 27, no. 11, September 2017

• M. Y. Elsayed, P.-V. Cicek, F. Nabki, and M. N. El-Gamal, "Bulk Mode Disk Resonator with Transverse Piezoelectric Actuation and Electrostatic Tuning," Journal of Microelectromechanical Systems, vol. 25, no. 2, April 2016

• M. Y. Elsayed, P.-V. Cicek, F. Nabki, and M.N. El-Gamal, "Surface Micromachined Combined Magnetometer/Accelerometer for Above-IC Integration," Journal of Microelectromechanical Systems, vol. 24, no. 4, p. 1029, August 2015

• Q. Zhang, P.-V. Cicek, K. Allidina, F. Nabki, and M.N. El-Gamal, "Surface- micromachined CMUT using low-temperature deposited silicon carbide membranes for above-IC integration," Journal of Microelectromechanical Systems, vol. 23, no. 2, p. 482, March 2014

• Q. Zhang, P.-V. Cicek, F.Nabki and M. N. El-Gamal, "Thin-film wafer-level encapsulation technology for above-IC hermetic MEMS packaging," Journal of Micromechanics and Microengineering, vol. 23, no. 12, p. 125012, December 2013

 

 M. A. Taghvaei, P.-V. Cicek, K. Allidina, F. Nabki, and N. N. El-Gamal, "A 0.13 μm CMOS Interface Circuit for a MEMS Resonator-Based Vacuum Measurement System," IEEE Transactions on Circuits and Systems I, vol 60, no. 12, p. 3136, December 2013

• R. H. Mekky, P.-V. Cicek, and N. N. El-Gamal, "Ultra low-power low-noise transimpedance amplifier for MEMS-based reference oscillators," Proceedings of the IEEE International Symposium on Electronics, Circuits and Systems, p. 345, December 2013

• P.-V. Cicek, Q. Zhang, T. Saha, S. Mahdavi, K. Allidina, F. Nabki and M. N. El-Gamal "A novel prototyping method for die-level monolitic integration of MEMS above-IC," Journal of Micromechanics and Microengineering, vol. 23, p. 65013, June 2013

• F. Nabki, P.-V. Cicek, T. Dusatko, S. Vengallatore, and M. N. El-Gamal, "Low-stress, CMOS-compatible silicon carbide surface micromachining technology—part II: beam resonators for MEMS above IC," Journal of Microelectromechanical Systems, vol. 20, p. 730, June 2011

• P.-V. Cicek, T. Saha, B. Waguih, F. Nabki, and M. N. El-Gamal, "Design of a low-cost MEMS monolithically-integrated relative humidity sensor," Proceedings of the IEEE International Conference on Microelectronics, p. 172, January 2011

• M. A. Taghvaei, P.-V. Cicek, K. Allidina, F. Nabki, and N. N. El-Gamal, "A MEMS- based temperature-compensated vacuum sensor for low-power monolithic integration," Proceedings of the IEEE International Symposium on Electronics, Circuits and Systems, p. 3276, May 2011

 

• P.-V. Cicek, et al., "Low actuation voltage silicon carbide RF switches for MEMS above IC," Proceedings of the IEEE International Conference on Electronics, Circuits and Systems, pp. 223-226, December 2009

• K. Allidina, M. A. Taghvaei, F. Nabki, P.-V. Cicek, and M. N. El-Gamal, "A MEMS-based vacuum sensor with a PLL frequency-to-voltage converter," Proceedings of the IEEE International Conference on Electronics, Circuits and Systems, December 2009

• F. Nabki, K. Allidina, F. Ahmad, P.-V. Cicek, and M. N. El-Gamal, "A Highly Integrated 1.8 GHz Frequency Synthesizer Based on a MEMS Resonator," IEEE Journal of Solid-State Circuits, vol. 44, no. 8, p. 2154, August 2009

• D. Lemoine, P.-V. Cicek, F. Nabki, and M. N. El-Gamal, "MEMS wafer-level vacuum packaging with transverse interconnects for CMOS integration," Proceedings of the IEEE Custom Integrated Circuits Conference, pp. 189-192, September 2008

INTELLECTUAL PROPERTY

 

• A. Robichaud, P.-V. Cicek, D. Deslandes, et F. Nabki, "Electromechanically damped resonator devices and methods," US Patent App 16/867,080, filed November 2020

 

• M.Y. Elsayed, M. N. El-Gamal, F. Nabki, et P.-V. Cicek, "Bulk mode micro- electromechanical resonator devices and methods," US Patent 10 742 191, issued August 2020

• M.Y. Elsayed, P.-V. Cicek, F. Nabki, and M. N. El-Gamal, "Combined magnetometer accelerometer mems devices and methods," US Patent 10 197 590, issued February  2019

• M. El-Gamal, P.-V. Cicek, and F. Nabki, "Methods and systems for humidity and pressure sensor overlay integration with electronics," US Patent 10 107 773, issued October 2018

• M. Elsayed, P.-V. Cicek, F. Nabki, and M. N. El-Gamal, "Microelectromechanical bulk acoustic wave devices and methods," US Patent 9 448 069, issued September 2016

• F. Nabki, P.-V. Cicek, and M. N. El-Gamal, "Low temperature ceramic microelectromechanical structures," US Patent 8 975 104, issued March 2015

• Q. Zhang, P.-V. Cicek, F. Nabki, and M. N. El-Gamal, "Methods and devices relating to capacitive micromachined diaphragms and transducers," US Patent 101 077 773, filed March 2014

• F. Nabki, P.-V. Cicek, and M. N. El-Gamal, "Low temperature ceramic microelectromechanical structures," US Patent 8 658 452, issued February 2014

• D. Lemoine, P.-V. Cicek, F. Nabki, and M. N. El-Gamal, "Low-Temperature Wafer Level Processing for MEMS Devices," US Patent 8 409 901, issued April 2013

Prof. Paul-Vahe Cicek