top of page
Prof. Cicek received his PhD degree in Electrical Engineering from McGill University (Montreal) in 2016 with a nomination to the ADESAQ Excellence Prize. Since 2009, he has been working as MEMS Engineering Lead and Manager of the microsystems division at MEMS Vision, a startup company he co-founded. In 2014, he was hired as Professor at Université du Québec à Montréal (UQAM), where he is exploring his research interests related to microtechnologies: MEMS, microfluidics, microelectronics, encapsulation, and their mutual integration.
​
Prof. Cicek is an expert in microfabrication, and has more than 10 years of extensive experience in the cleanroom. To date, he has authored around 20 publications and holds 7 issued patents, although much more is on the way, thanks to µTIC!

PUBLICATIONS

 

• A. Robichaud, D. Deslandes, P.-V. Cicek, and F. Nabki, “A System in Package Based on a Piezoelectric Micromachined Ultrasonic Transducer Matrix for Ranging Applications,” Sensors, vol. 21, no. 8, p. 2590, April 2021

​

• A. Robichaud, D. Deslandes, P. -V. Cicek, and F. Nabki, "Electromechanical Tuning of Piecewise Stiffness and Damping for Long-Range and High-Precision Piezoelectric Ultrasonic Transducers," Journal of Microelectromechanical Systems, vol. 29, no. 5, pp. 1189-1198, October 2020

 

• A. Robichaud, P.-V. Cicek, D. Deslandes, and F. Nabki, "Frequency Tuning Technique of Piezoelectric Ultrasonic Transducers for Ranging Applications," Journal of Microelectromechanical Systems, vol. 27, no. 3, June 2018

​

• P.-V. Cicek, M. Y. Elsayed, F. Nabki, and M. El-Gamal, "A novel multi-level IC- compatible surface microfabrication technology for MEMS with independently controlled lateral and vertical submicron transduction gaps," Journal of Micromechanics and Microengineering, vol. 27, no. 11, September 2017

​

• M. Y. Elsayed, P.-V. Cicek, F. Nabki, and M. N. El-Gamal, "Bulk Mode Disk Resonator with Transverse Piezoelectric Actuation and Electrostatic Tuning," Journal of Microelectromechanical Systems, vol. 25, no. 2, April 2016

​

• M. Y. Elsayed, P.-V. Cicek, F. Nabki, and M.N. El-Gamal, "Surface Micromachined Combined Magnetometer/Accelerometer for Above-IC Integration," Journal of Microelectromechanical Systems, vol. 24, no. 4, p. 1029, August 2015

​

• Q. Zhang, P.-V. Cicek, K. Allidina, F. Nabki, and M.N. El-Gamal, "Surface- micromachined CMUT using low-temperature deposited silicon carbide membranes for above-IC integration," Journal of Microelectromechanical Systems, vol. 23, no. 2, p. 482, March 2014

​

• Q. Zhang, P.-V. Cicek, F.Nabki and M. N. El-Gamal, "Thin-film wafer-level encapsulation technology for above-IC hermetic MEMS packaging," Journal of Micromechanics and Microengineering, vol. 23, no. 12, p. 125012, December 2013

 

• M. A. Taghvaei, P.-V. Cicek, K. Allidina, F. Nabki, and N. N. El-Gamal, "A 0.13 μm CMOS Interface Circuit for a MEMS Resonator-Based Vacuum Measurement System," IEEE Transactions on Circuits and Systems I, vol 60, no. 12, p. 3136, December 2013

​

• R. H. Mekky, P.-V. Cicek, and N. N. El-Gamal, "Ultra low-power low-noise transimpedance amplifier for MEMS-based reference oscillators," Proceedings of the IEEE International Symposium on Electronics, Circuits and Systems, p. 345, December 2013

​

• P.-V. Cicek, Q. Zhang, T. Saha, S. Mahdavi, K. Allidina, F. Nabki and M. N. El-Gamal "A novel prototyping method for die-level monolitic integration of MEMS above-IC," Journal of Micromechanics and Microengineering, vol. 23, p. 65013, June 2013

​

• F. Nabki, P.-V. Cicek, T. Dusatko, S. Vengallatore, and M. N. El-Gamal, "Low-stress, CMOS-compatible silicon carbide surface micromachining technology—part II: beam resonators for MEMS above IC," Journal of Microelectromechanical Systems, vol. 20, p. 730, June 2011

​

• P.-V. Cicek, T. Saha, B. Waguih, F. Nabki, and M. N. El-Gamal, "Design of a low-cost MEMS monolithically-integrated relative humidity sensor," Proceedings of the IEEE International Conference on Microelectronics, p. 172, January 2011

​

• M. A. Taghvaei, P.-V. Cicek, K. Allidina, F. Nabki, and N. N. El-Gamal, "A MEMS- based temperature-compensated vacuum sensor for low-power monolithic integration," Proceedings of the IEEE International Symposium on Electronics, Circuits and Systems, p. 3276, May 2011

 

• P.-V. Cicek, et al., "Low actuation voltage silicon carbide RF switches for MEMS above IC," Proceedings of the IEEE International Conference on Electronics, Circuits and Systems, pp. 223-226, December 2009

​

• K. Allidina, M. A. Taghvaei, F. Nabki, P.-V. Cicek, and M. N. El-Gamal, "A MEMS-based vacuum sensor with a PLL frequency-to-voltage converter," Proceedings of the IEEE International Conference on Electronics, Circuits and Systems, December 2009

​

• F. Nabki, K. Allidina, F. Ahmad, P.-V. Cicek, and M. N. El-Gamal, "A Highly Integrated 1.8 GHz Frequency Synthesizer Based on a MEMS Resonator," IEEE Journal of Solid-State Circuits, vol. 44, no. 8, p. 2154, August 2009

​

• D. Lemoine, P.-V. Cicek, F. Nabki, and M. N. El-Gamal, "MEMS wafer-level vacuum packaging with transverse interconnects for CMOS integration," Proceedings of the IEEE Custom Integrated Circuits Conference, pp. 189-192, September 2008

​

​

INTELLECTUAL PROPERTY

 

• A. Robichaud, P.-V. Cicek, D. Deslandes, et F. Nabki, "Electromechanically damped resonator devices and methods," US Patent App 16/867,080, filed November 2020

 

• M.Y. Elsayed, M. N. El-Gamal, F. Nabki, et P.-V. Cicek, "Bulk mode micro- electromechanical resonator devices and methods," US Patent 10 742 191, issued August 2020

​

• M.Y. Elsayed, P.-V. Cicek, F. Nabki, and M. N. El-Gamal, "Combined magnetometer accelerometer mems devices and methods," US Patent 10 197 590, issued February  2019

​

• M. El-Gamal, P.-V. Cicek, and F. Nabki, "Methods and systems for humidity and pressure sensor overlay integration with electronics," US Patent 10 107 773, issued October 2018

​

• M. Elsayed, P.-V. Cicek, F. Nabki, and M. N. El-Gamal, "Microelectromechanical bulk acoustic wave devices and methods," US Patent 9 448 069, issued September 2016

​

• F. Nabki, P.-V. Cicek, and M. N. El-Gamal, "Low temperature ceramic microelectromechanical structures," US Patent 8 975 104, issued March 2015

​

• Q. Zhang, P.-V. Cicek, F. Nabki, and M. N. El-Gamal, "Methods and devices relating to capacitive micromachined diaphragms and transducers," US Patent 101 077 773, filed March 2014

​

• F. Nabki, P.-V. Cicek, and M. N. El-Gamal, "Low temperature ceramic microelectromechanical structures," US Patent 8 658 452, issued February 2014

​

• D. Lemoine, P.-V. Cicek, F. Nabki, and M. N. El-Gamal, "Low-Temperature Wafer Level Processing for MEMS Devices," US Patent 8 409 901, issued April 2013

Prof. Paul-Vahe Cicek

© 2017 Paul-Vahé Cicek

bottom of page